Houssa, MichelMichelHoussaMertens, PaulPaulMertensHeyns, MarcMarcHeynsHeon, J. S.J. S.HeonHalliyal, A.A.HalliyalOgle, B.B.Ogle2021-10-142021-10-142000https://imec-publications.be/handle/20.500.12860/4435Soft breakdown in very thin Ta2 O5 gate dielectric layersJournal article