Ike, ShinichiShinichiIkeSimoen, EddyEddySimoenShimura, YosukeYosukeShimuraHikavyy, AndriyAndriyHikavyyVandervorst, WilfriedWilfriedVandervorstLoo, RogerRogerLooTakeuchi, WakanaWakanaTakeuchiNakatsuka, OsamuOsamuNakatsukaZaima, ShigeakiShigeakiZaima2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26764Structural and electrical properties of low temperature CVD-grown SiGe epitaxial layersMeeting abstract