Flare in extreme ultraviolet lithography: metrology, out-of-band radiation, fractal point spread function, and flare map calibration

Lorusso, GianGianLorussoVan Roey, FriedaFriedaVan RoeyHendrickx, EricEricHendrickxFenger, GermainGermainFengerLam, MichaelMichaelLamChristian, ZunigaZunigaChristianHabib, MohamedMohamedHabibDiab, HeshamHeshamDiabWord, JamesJamesWord2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/15753Flare in extreme ultraviolet lithography: metrology, out-of-band radiation, fractal point spread function, and flare map calibrationJournal article