Dekkers, HaroldHaroldDekkersDuerinckx, FilipFilipDuerinckxSzlufcik, JozefJozefSzlufcikNijs, JohanJohanNijs2021-10-062021-10-061999https://imec-publications.be/handle/20.500.12860/3398Silicon surface texturing by reactive ion etchingOral presentation