Accurate and robust noise-based trigger algorithm for soft breakdown detection in ultrathin gate dielectrics

Roussel, PhilippePhilippeRousselDegraeve, RobinRobinDegraeveVan den bosch, G.G.Van den boschKaczer, BenBenKaczerGroeseneken, GuidoGuidoGroeseneken2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5625Accurate and robust noise-based trigger algorithm for soft breakdown detection in ultrathin gate dielectricsJournal article