Philipsen, VickyVickyPhilipsenLuong, VuVuLuongHendrickx, EricEricHendrickxErdmann, AndreasAndreasErdmannXu, DongboDongboXuEvanschitzky, PeterPeterEvanschitzkyvan de Kruijs, RobbertRobbertvan de KruijsEdrisi, ArashArashEdrisiScholze, FrankFrankScholzeLaubis, ChristianChristianLaubisIrmscher, MathiasMathiasIrmscherNaasz, SandraSandraNaasz2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27139Mitigating EUV mask 3D effects by alternative metal absorbersProceedings paper