Hendrickx, EricEricHendrickxMonnoyer, PhilippePhilippeMonnoyerVan Look, LieveLieveVan LookVandenberghe, GeertGeertVandenberghe2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9023Optical extensions towards the 45-nm nodeProceedings paper