Effective EUVL mask cleaning technology solutions for mask manufacturing and in-fab mask maintenance

Dietze, UweUweDietzeDress, PeterPeterDressWaehler, TobiasTobiasWaehlerSingh, SherjangSherjangSinghJonckheere, RikRikJonckheereBaudemprez, BartBartBaudemprez2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/18845Effective EUVL mask cleaning technology solutions for mask manufacturing and in-fab mask maintenanceProceedings paper