Investigation on carrier transport through AlN nucleation layer from differently doped Si(111) substrates

Li, XiangdongXiangdongLiVan Hove, MarleenMarleenVan HoveZhao, MingMingZhaoBakeroot, BenoitBenoitBakerootYou, ShuzhenShuzhenYouGroeseneken, GuidoGuidoGroesenekenDecoutere, StefaanStefaanDecoutere2021-10-252021-10-2520180018-9383https://imec-publications.be/handle/20.500.12860/31173Investigation on carrier transport through AlN nucleation layer from differently doped Si(111) substratesJournal articlehttps://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=8315113