Dry removal of a surface functionalization chemistry used for pattern collapse prevention

Vereecke, GuyGuyVereeckeKomori, KanaKanaKomoriNakano, YutaYutaNakanoSebaai, FaridFaridSebaaiXu, XiuMeiXiuMeiXuOniki, YusukeYusukeOnikiHolsteyns, FrankFrankHolsteyns2021-10-262021-10-262018https://imec-publications.be/handle/20.500.12860/32186Dry removal of a surface functionalization chemistry used for pattern collapse preventionMeeting abstract