De Simone, DaniloDaniloDe SimoneSanapala, RavikumarRavikumarSanapalaAndrrew, CrossCrossAndrrewPreil, MosheMoshePreilQian, JinJinQianSumar, ShishirShishirSumarAnantha, VidyasagarVidyasagarAnanthaSah, KaushikKaushikSahEitapence, ScottScottEitapenceVan Den Heuvel, DieterDieterVan Den HeuvelFoubert, PhilippePhilippeFoubert2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28158EUV reticle print verification with advanced broadband optical wafer inspection and e-beam review systemsProceedings paper10.1117/12.2281632