A combined SPM/TOFSIMS tool to obtain real chemical 3D information

Spampinato, ValentinaValentinaSpampinatoDialameh, MasoudMasoudDialamehFleischmann, ClaudiaClaudiaFleischmannFranquet, AlexisAlexisFranquetConard, ThierryThierryConardVandervorst, WilfriedWilfriedVandervorst2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/29478A combined SPM/TOFSIMS tool to obtain real chemical 3D informationMeeting abstracthttp://sims.confer.uj.edu.pl/resources/Book_of_Abstracts_A4_v1.pdf