Migrating from planar to FinFET for further CMOS scaling: SOI or bulk?

Mitard, JeromeJeromeMitardWitters, LiesbethLiesbethWittersMercha, AbdelkarimAbdelkarimMerchaKerner, ChristophChristophKernerDittrich, RokRokDittrichRakowski, MichalMichalRakowskiOrtolland, ClaudeClaudeOrtollandRagnarsson, Lars-AkeLars-AkeRagnarssonParvais, BertrandBertrandParvaisDe Keersgieter, AnAnDe KeersgieterKubicek, StefanStefanKubicekRedolfi, AugustoAugustoRedolfiRooyackers, RitaRitaRooyackersVrancken, ChristaChristaVranckenBrus, StephanStephanBrusLauwers, AnneAnneLauwersAbsil, PhilippePhilippeAbsilBiesemans, SergeSergeBiesemansHoffmann, Thomas Y.Thomas Y.Hoffmann2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/15878Migrating from planar to FinFET for further CMOS scaling: SOI or bulk?Proceedings paper