Hüe, F.F.HüeHytch, MartinMartinHytchLou, NelsonNelsonLouBender, HugoHugoBenderClaverie, AlainAlainClaverie2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/13899Strain mapping in MOSFETs by transmission electron microscopyProceedings paper