Ultra-thin film fully-depleted SOI CMOS with raised G/S/D device architecture for sub-100 nm applications

van Meer, H.H.van MeerDe Meyer, KristinKristinDe Meyer2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5745Ultra-thin film fully-depleted SOI CMOS with raised G/S/D device architecture for sub-100 nm applicationsProceedings paper