Modlinski, RobertRobertModlinskiChen, Q.Q.ChenWitvrouw, AnnAnnWitvrouwRatchev, PetarPetarRatchevPuers, BobBobPuersden Toonder, J.M.J.J.M.J.den ToonderDe Wolf, IngridIngridDe Wolf2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7906Reliability of RF-MEMS: stress relaxation in Al-alloy filmsMeeting abstract