Besbes, M.M.BesbesHugonin, J.P.J.P.HugoninLalanne, P.P.Lalannevan Haver, S.S.van HaverJanssen, O.T.A.O.T.A.JanssenNugrowati, A.M.A.M.NugrowatiXu, M.M.XuPereira, S.F.S.F.PereiraUrbach, H.P.H.P.Urbachvan de Nes, A.S.A.S.van de NesBienstman, PeterPeterBienstmanGranet, G.G.GranetMoreau, A.A.MoreauHelfert, S.S.HelfertSukharev, M.M.SukharevSeideman, T.T.SeidemanBaida, F.I.F.I.BaidaGuizal, B.B.GuizalVan Labeke, D.D.Van Labeke2021-10-162021-10-162007-07https://imec-publications.be/handle/20.500.12860/11726Numerical analysis of a slit-groove diffraction problemJournal article