Plasma-assisted ALD of LiPO(N) for solid state batteries

Put, BrechtBrechtPutMees, MaartenMaartenMeesHornsveld, NorahNorahHornsveldVereecken, PhilippePhilippeVereeckenKessels, ErwinErwinKesselsCreatore, AdrianaAdrianaCreatore2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27172Plasma-assisted ALD of LiPO(N) for solid state batteriesMeeting abstracthttp://ma.ecsdl.org/content/MA2016-02/3/347.abstract