Initial assessment of the impact of the use of a hard pellicle on imaging

De Bisschop, PeterPeterDe BisschopBruls, RichardRichardBrulsCicilia, OrlandoOrlandoCiciliaUitterdijk, TammoTammoUitterdijkGrenville, AndrewAndrewGrenvilleKocsis, MichaelMichaelKocsisVan Peski, ChrisChrisVan Peski2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7390Initial assessment of the impact of the use of a hard pellicle on imagingProceedings paper