A million wafer, virtual fabrication approach to determine process capability requirements for an industry-standard 5nm BEOL two-level metal flow

Clark, WilliamWilliamClarkJuncker, AurelieAurelieJunckerPaladugu, E.E.PaladuguFried, DavidDavidFriedWilson, ChrisChrisWilsonPourtois, GeoffreyGeoffreyPourtoisGallagher, EmilyEmilyGallagherde Jamblinne de Meux, AlbertAlbertde Jamblinne de MeuxPiumi, DanieleDanielePiumiBoemmels, JuergenJuergenBoemmelsTokei, ZsoltZsoltTokeiMocuta, DanDanMocuta2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/26462A million wafer, virtual fabrication approach to determine process capability requirements for an industry-standard 5nm BEOL two-level metal flowProceedings paperhttp://ieeexplore.ieee.org/document/7605144/