The effect of ion implantation on the metal contamination of silicon surfaces in aqueous solution

Loewenstein, LeeLeeLoewensteinMertens, PaulPaulMertensHeyns, MarcMarcHeyns2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5451The effect of ion implantation on the metal contamination of silicon surfaces in aqueous solutionProceedings paper