Malinowski, PawelPawelMalinowskiDuboz, Jean-YvesJean-YvesDubozDe Moor, PietPietDe MoorMinoglou, KikiKikiMinoglouJohn, JoachimJoachimJohnMartin Horcajo, SaraSaraMartin HorcajoSemond, FabriceFabriceSemondFrayssinet, EricEricFrayssinetVerhoeve, PeterPeterVerhoeveEsposito, MarcoMarcoEspositoGiordanengo, BorisBorisGiordanengoBenMoussa, AliAliBenMoussaMertens, RobertRobertMertensVan Hoof, ChrisChrisVan Hoof2021-10-192021-10-1920110003-6951https://imec-publications.be/handle/20.500.12860/19366Extreme ultraviolet detection using AlGaN-on-Si inverted Schottky photodiodesJournal articlehttp://apl.aip.org/resource/1/applab/v98/i14/p141104_s1