Bargallo Gonzalez, MireiaMireiaBargallo GonzalezSimoen, EddyEddySimoenEneman, GeertGeertEnemanDe Jaeger, BriceBriceDe JaegerWang, GangGangWangLoo, RogerRogerLooClaeys, CorCorClaeys2021-10-212021-10-212013-09https://imec-publications.be/handle/20.500.12860/22018Defect assessment and leakage control in Ge pFET junctionsMeeting abstract