Impact of methane concentration on surface morphology and boron incorporation of heavily boron-doped single crystal diamond layers

Nicley, ShannonShannonNicleyVanpoucke, Danny E. P.Danny E. P.VanpouckeAraujo, DanielDanielAraujoRouzbahani Bayatani, RozitaRozitaRouzbahani BayataniLloret, FernandoFernandoLloretPobedinskas, PauliusPauliusPobedinskasHaenen, KenKenHaenen2022-06-202021-11-022022-06-2020210008-6223WOS:000600206500014https://imec-publications.be/handle/20.500.12860/38331Impact of methane concentration on surface morphology and boron incorporation of heavily boron-doped single crystal diamond layersJournal article10.1016/j.carbon.2020.10.061WOS:000600206500014CHEMICAL-VAPOR-DEPOSITIONELECTRICAL CHARACTERIZATIONELECTRONIC-PROPERTIESRAMAN-SPECTRAGROWTH-RATETHIN-FILMSCONDUCTIVITYTEMPERATURESUBSTRATEMECHANISM