Nabiollahi, NabiNabiNabiollahi2021-10-242021-10-242017-12https://imec-publications.be/handle/20.500.12860/29054Processing Induced Changes of Mechanical Stresses in and near Cu Through Silicon Vias (TSVs): A Finite Element Modelling StudyPHD thesishttps://limo.libis.be/primo-explore/fulldisplay?docid=LIRIAS1941855&context=L&vid=Lirias&search_scope=Lirias&tab=default_tab&lang=en_US&fromSitemap=1