CMP process steps for silicon-based photonics integration

Ong, PatrickPatrickOngVerheyen, PeterPeterVerheyenLepage, GuyGuyLepageVan Campenhout, JorisJorisVan CampenhoutAbsil, PhilippePhilippeAbsil2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24346CMP process steps for silicon-based photonics integrationOral presentation