Okudur, Oguzhan OrkutOguzhan OrkutOkudurVanstreels, KrisKrisVanstreelsDe Wolf, IngridIngridDe WolfHangen, UdeUdeHangenQiu, AnqiAnqiQiu2021-10-242021-10-2420171438-1656https://imec-publications.be/handle/20.500.12860/29106Substrate independent elastic modulus of thin low dielectric constant materialsJournal articlehttp://onlinelibrary.wiley.com/doi/10.1002/adem.201600653/full