Cost-performance optimization of fine-pitch W2W bonding: functional system partitioning with heterogeneous FEOL/BEOL configurations

Milojevic, DragomirDragomirMilojevicBeyne, EricEricBeyneVan der Plas, GeertGeertVan der PlasWang, JaneJaneWangDebacker, PeterPeterDebacker2023-01-192021-11-022023-01-1920210277-786XWOS:000671888300019https://imec-publications.be/handle/20.500.12860/37728Cost-performance optimization of fine-pitch W2W bonding: functional system partitioning with heterogeneous FEOL/BEOL configurationsProceedings paper10.1117/12.2552036978-1-5106-3424-4WOS:000671888300019