A method of image-based aberration metrology for EUVL tools

Levinson, ZacZacLevinsonRaghunathan, SudharSudharRaghunathanVerduijn, ErikErikVerduijnWood, ObertObertWoodMangat, PawitterPawitterMangatGoldberg, KennethKennethGoldbergBenk, MarkusMarkusBenkWojdyla, AntoineAntoineWojdylaPhilipsen, VickyVickyPhilipsenHendrickx, EricEricHendrickxSmith, BruceBruceSmith2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25535A method of image-based aberration metrology for EUVL toolsProceedings paperhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2208407