Modeling the suppression of boron diffusion in Si/Si/Ge due to carbon incorporation

Rizk, SamerSamerRizkYaser M., HaddaraHaddaraYaser M.Sibaja-Hernandez, ArturoArturoSibaja-Hernandez2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11108Modeling the suppression of boron diffusion in Si/Si/Ge due to carbon incorporationProceedings paper