Das, JohanJohanDasRuythooren, WouterWouterRuythoorenVandersmissen, RafRafVandersmissenDerluyn, JoffJoffDerluynGermain, MarianneMarianneGermainBorghs, GustaafGustaafBorghs2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10281Substrate removal of AlGaN/GaN HEMTs using laser lift-offJournal article