Semi-damascene Integration of a 2-layer MOL VHV Scaling Booster to Enable 4-track Standard Cells

Vega Gonzalez, VictorVictorVega GonzalezRadisic, DunjaDunjaRadisicChoudhury, SubhobrotoSubhobrotoChoudhuryTierno, DavideDavideTiernoThiam, ArameArameThiamBatuk, DmitryDmitryBatukMartinez Alanis, Gerardo TadeoGerardo TadeoMartinez AlanisSeidel, FelixFelixSeidelDecoster, StefanStefanDecosterKundu, SouvikSouvikKunduTsvetanova, DianaDianaTsvetanovaPeter, AntonyAntonyPeterDe Coster, HanneHanneDe CosterSepulveda Marquez, AlfonsoAlfonsoSepulveda MarquezAltamirano Sanchez, EfrainEfrainAltamirano SanchezChan, BTBTChanDrissi, YoussefYoussefDrissiSherazi, YasserYasserSheraziLee, Jae UkJae UkLeeCiofi, IvanIvanCiofiMurdoch, GayleGayleMurdochNagesh, NishanthNishanthNageshHellings, GeertGeertHellingsRyckaert, JulienJulienRyckaertBiesemans, SergeSergeBiesemansDentoni Litta, EugenioEugenioDentoni LittaHoriguchi, NaotoNaotoHoriguchiPark, SeonghoSeonghoParkTokei, ZsoltZsoltTokei2023-06-022023-05-252023-06-0220222380-9248WOS:000968800700139https://imec-publications.be/handle/20.500.12860/41616Semi-damascene Integration of a 2-layer MOL VHV Scaling Booster to Enable 4-track Standard CellsProceedings paper10.1109/IEDM45625.2022.10019483978-1-6654-8959-1WOS:000968800700139