Experimental Validation of Process-Induced Variability Aware SPICE Simulation Platform for Sub-20 nm FinFET Technologies

Rawat, AmitaAmitaRawatSharan, NehaNehaSharanJang, DoyoungDoyoungJangChiarella, ThomasThomasChiarellaBufler, FabianFabianBuflerCatthoor, FranckyFranckyCatthoorParvais, BertrandBertrandParvaisGanguly, UdayanUdayanGanguly2023-08-072023-06-202023-08-0720210018-9383WOS:000622100700005https://imec-publications.be/handle/20.500.12860/42021Experimental Validation of Process-Induced Variability Aware SPICE Simulation Platform for Sub-20 nm FinFET TechnologiesJournal article10.1109/TED.2021.3053185WOS:000622100700005WORK-FUNCTIONMETAL