Vandooren, AnneAnneVandoorenLeonelli, DanieleDanieleLeonelliRooyackers, RitaRitaRooyackersArstila, KaiKaiArstilaGroeseneken, GuidoGuidoGroesenekenHuyghebaert, CedricCedricHuyghebaert2021-10-192021-10-192011-09https://imec-publications.be/handle/20.500.12860/20025Electrical results of vertical Si N-tunnel FETsProceedings paper