Stresses in strained GeSi stripes: calculation and determination from Raman measurements

Jain, SureshSureshJainDietrich, B.B.DietrichRichter, H.H.RichterAtkinson, A.A.AtkinsonHarker, A. H.A. H.Harker2021-09-292021-09-291995https://imec-publications.be/handle/20.500.12860/685Stresses in strained GeSi stripes: calculation and determination from Raman measurementsJournal article