Baklanov, MikhaïlMikhaïlBaklanovSmirnov, EvgenyEvgenySmirnovZhao, LarryLarryZhao2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/18524Ultra low dielectric constant materials for 22 nm technology node and beyondMeeting abstract