Determining the carbon detection limit with magnetic sector dynamic secondary ion mass spectrometry (SIMS)

Merkulov, AlexAlexMerkulov2025-03-312024-10-262025-03-3120240042-207XWOS:001337172000001https://imec-publications.be/handle/20.500.12860/44683Determining the carbon detection limit with magnetic sector dynamic secondary ion mass spectrometry (SIMS)Journal article10.1016/j.vacuum.2024.113714WOS:001337172000001