Roughness study on L/S patterning with chemo

Dudash, ViktorViktorDudashSuh, Hyo SeonHyo SeonSuhLorusso, GianGianLorussoHer, YoungJunYoungJunHerLi, JinJinLiMonreal, VictorVictorMonrealBaskaran, DurairajDurairajBaskaranALPERSON, BOAZBOAZALPERSONSKJONNEMAND, KARLKARLSKJONNEMANDMack, ChrisChrisMack2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/32921Roughness study on L/S patterning with chemoProceedings paperhttps://www.dsasymposium.org/index.php/program