Simoen, EddyEddySimoenPoyai, AmpornAmpornPoyaiClaeys, CorCorClaeysLukyanchikova, N.N.LukyanchikovaPetrichuk, M.M.PetrichukGarbar, N.N.GarbarCzerwinski, A.A.CzerwinskiKatcki, J.J.KatckiRatajczak, J.J.RatajczakGaubas, EugenijusEugenijusGaubas2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5666Electrical characterization of shallow cobalt-silicided junctionsJournal article