Low Tc, low Ms CoFeBX alloy as free layer material for high performance perpendicular MRAM stack

Couet, SebastienSebastienCouetRao, SiddharthSiddharthRaoSwerts, JohanJohanSwertsVan Beek, SimonSimonVan BeekSankaran, KiroubanandKiroubanandSankaranCarpenter, RobertRobertCarpenterMertens, SofieSofieMertensKim, WoojinWoojinKimCrotti, DavideDavideCrottiKar, Gouri SankarGouri SankarKar2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/32761Low Tc, low Ms CoFeBX alloy as free layer material for high performance perpendicular MRAM stackMeeting abstract