Vaglio Pret, AlessandroAlessandroVaglio PretGronheid, RoelRoelGronheidEngelen, JanJanEngelenYan, Pei-YangPei-YangYanLeeson, MichaelMichaelLeesonYounkin, ToddToddYounkinGaridis, KostasKostasGaridisBiafore, JohnJohnBiafore2021-10-212021-10-2120130021-4922https://imec-publications.be/handle/20.500.12860/23209Mask effects on resist variability in extreme ultraviolet lithographyJournal articlehttp://jjap.jsap.jp/link?JJAP/52/06GC02/