Aguilera, LidiaLidiaAguileraPolspoel, WouterWouterPolspoelVolodin, AlexanderAlexanderVolodinVan Haesendonck, ChrisChrisVan HaesendonckPorti, MarcMarcPortiVandervorst, WilfriedWilfriedVandervorstNafria, MontserratMontserratNafriaAymerich, XavierXavierAymerich2021-10-172021-10-1720081071-1023https://imec-publications.be/handle/20.500.12860/13295Influence of vacuum environment on conductive atomic force microscopy measurements of advanced metal-oxide-semiconductor gate dielectricsJournal article