A new method for the lifetime determination of submicron metal interconnects by means of a parallel test structure

Vanstreels, KrisKrisVanstreelsD'Olieslaeger, MarcMarcD'OlieslaegerDe Ceuninck, WardWardDe CeuninckD'Haen, JanJanD'HaenMaex, KarenKarenMaex2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/11482A new method for the lifetime determination of submicron metal interconnects by means of a parallel test structureJournal article