Simoen, EddyEddySimoenBrammertz, GuyGuyBrammertzPenaud, JulienJulienPenaudMerckling, ClementClementMercklingLin, DennisDennisLinWang, Wei-EWei-EWangMeuris, MarcMarcMeuris2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16224A DLTS study of Pt/Al2O3/InxGa1-xAs capacitorsProceedings paper