Xu, MengleiMengleiXuBearda, TwanTwanBeardaHasan, MahmudulMahmudulHasanSivaramakrishnan Radhakrishnan, HariharsudanHariharsudanSivaramakrishnan RadhakrishnanGordon, IvanIvanGordonSzlufcik, JozefJozefSzlufcikPoortmans, JefJefPoortmans2021-10-262021-10-262018https://imec-publications.be/handle/20.500.12860/32312Selective deposition of a-Si:H: a proof-of-concept studyProceedings paperhttps://ieeexplore.ieee.org/document/8547827