Ortolland, ClaudeClaudeOrtollandRagnarsson, Lars-AkeLars-AkeRagnarssonKerner, ChristophChristophKernerChiarella, ThomasThomasChiarellaRosseel, ErikErikRosseelOkuno, YasutoshiYasutoshiOkunoFavia, PaolaPaolaFaviaRichard, OlivierOlivierRichardEveraert, Jean-LucJean-LucEveraertSchram, TomTomSchramKubicek, StefanStefanKubicekAbsil, PhilippePhilippeAbsilBiesemans, SergeSergeBiesemansSchreutelkamp, RobertRobertSchreutelkampHoffmann, Thomas Y.Thomas Y.Hoffmann2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/15952Junction anneal sequence optimization for advanced high-k / metal gate CMOS technologyProceedings paper