Thijs, StevenStevenThijsLinten, DimitriDimitriLintenScholz, MirkoMirkoScholzMercha, AbdelkarimAbdelkarimMerchaVan der Plas, GeertGeertVan der PlasTravaly, YoussefYoussefTravalyVan Olmen, JanJanVan OlmenGroeseneken, GuidoGuidoGroeseneken2021-10-182021-10-182010https://imec-publications.be/handle/20.500.12860/18081ESD evaluation of 3D SIC technology using TSVOral presentation