Impact of annealing-induced compaction on electronic properties of atomic-layer-deposited Al2O3

Afanasiev, ValeriValeriAfanasievStesmans, AndreAndreStesmansMrstik, B.J.B.J.MrstikZhao, ChaoChaoZhao2021-10-142021-10-142002https://imec-publications.be/handle/20.500.12860/5937Impact of annealing-induced compaction on electronic properties of atomic-layer-deposited Al2O3Journal article