Selvaraja, ShankarShankarSelvarajaBogaerts, WimWimBogaertsVan Thourhout, DriesDriesVan ThourhoutBaets, RoelRoelBaetsSleeckx, ErikErikSleeckxSchaekers, MarcMarcSchaekers2021-10-162021-10-162007-12https://imec-publications.be/handle/20.500.12860/12874Deposited silicon-on-insulation material technology for photonic integrated circuitryProceedings paper