Development of advanced corrosion free organic strippers for ULSI processing

Rotondaro, AntonioAntonioRotondaroHonda, K.K.HondaMaw, T.T.MawPerry, D.D.PerryLux, MarcelMarcelLuxHeyns, MarcMarcHeynsClaeys, C.C.ClaeysDaraktchiev, I.I.Daraktchiev2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1439Development of advanced corrosion free organic strippers for ULSI processingProceedings paper